| Series | SAM3S | |
| Package | Tray | |
| Part Status | Active | |
| Core Processor | ARM® Cortex®-M3 | |
| Core Size | 32-Bit | |
| Speed | 64MHz | |
| Connectivity | I²C, MMC, SPI, SSC, UART/USART, USB | |
| Peripherals | Brown-out Detect/Reset, DMA, I²S, POR, PWM, WDT | |
| Number of I/O | 47 | |
| Program Memory Size | 64KB (64K x 8) | |
| Program Memory Type | FLASH | |
| EEPROM Size | - | |
| RAM Size | 16K x 8 | |
| Voltage - Supply (Vcc/Vdd) | 1.62V ~ 3.6V | |
| Data Converters | A/D 10x10/12b; D/A 2x12b | |
| Oscillator Type | Internal | |
| Operating Temperature | -40°C ~ 85°C (TA) | |
| Mounting Type | Surface Mount | |
| Package / Case | 64-LQFP | |
| Supplier Device Package | 64-LQFP (10x10) |
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